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A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching | Micro and Nano Systems Letters | Full Text
A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching | Micro and Nano Systems Letters | Full Text
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Prevention of convex corner undercutting in fabrication of silicon microcantilevers by wet anisotropic etching | Semantic Scholar
A simple and robust model to explain convex corner undercutting in wet bulk micromachining | Micro and Nano Systems Letters | Full Text
Convex corner compensation for a compact seismic mass with high aspect ratio using anisotropic wet etching of (100) silicon | Semantic Scholar
A compensating method of convex corner in etching of (110) silicon | SpringerLink
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